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Polishing Performance and Removal Mechanism of Core-Shell Structured Diamond/SiO2 Abrasives on Sapphire Wafer
Release time:2024-04-03  Hits:

Affiliation of Author(s):材料科学与工程学院
Journal:Micromachines
Indexed by:Journal paper
Translation or Not:no
Date of Publication:2022-12-01

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