Study on Properties of TiSi/C, TiSiN/C and TiSiO/C Multilayer Thin Films Prepared by High-Power Pulsed Magnetron Sputtering
Release time:2024-04-03 Hits:
Affiliation of Author(s):材料科学与工程学院
Journal:Materials Science and Engineering
Indexed by:会议论文
Volume:439
Issue:022019
Page Number:1-8.
Translation or Not:no
Date of Publication:2018-11-27
