C2H2流量对阴极弧沉积AlTiCN 涂层结构和性能的影响

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Affiliation of Author(s):材料科学与工程学院

Journal:热加工工艺

Funded by:省、自治区、直辖市科技项目

Note:2020.06.28 通过。报告编号：ZWHX0200054

Indexed by:Journal paper

Document Code:11514

ISSN No.:1001-3814

Translation or Not:no

CN No.:11-1860/TG

Date of Publication:2020-01-01